MEEM6005

MEEM6005 Micro Systems Technology

Part I

Course Duration: One Semester

No. of Credit Units: 3

Level: P6

Medium of Instruction: English

Prerequisites: Nil

Precursors: Nil

Equivalent Courses: Nil

Exclusive Courses: Nil

Part II

1. Course Aims:

The aim of the course is to introduce the state-of-the-art knowledge of micro systems technologies for modern manufacturing. It will enable students to understand the basic principles and develop skills in the areas of table-up manufacturing, micro electronic and mechanical systems (MEMS), micro robotics, and micro electronics such as VLSI (very-large-scale-integration) and semiconductor manufacturing.

2. Course Intended Learning Outcomes (CILOs)

Upon successful completion of this course, students should be able to:

No.	CILOs	Weighting(if applicable)
1.	Identify the basic principles of micro system technology and table-top manufacturing;	3
2.	Implement , table-top manufacturing process with MEMS and micro-robotics technologies;	3
3.	Design a micro system relating to basic electronics of VLSI (very-large-scale-integration)	2
4.	Investigate semiconductor manufacturing and business Model	1

3. Teaching and Learning Activities (TLAs)

Activity Type	Timetabled Activity (Hours per week)
Lecture/Tutorial/Laboratory Mix	Lecture ( 3 )

TLAs	Large Class Activities	Small Group Activities	Total (hrs)
CILO 1	9	2	11
CILO 2	9	2	11
CILO 3	5	2	7
CILO 4	4	2	6
Total (hrs)	27	8	35

Large class activities mainly include lectures, and small group activities comprise of case studies in groups.
Note: Out-of-classroom activities

4. Assessment Tasks/Activities (ATs)

ILO No	Assignments (2)	Project Report (one per group)	Presentation (one per group)	Total (%)
CILO 1	17	12	8	37
CILO 2	19	11	8	38
CILO 3	9	4	2	15
CILO 4	5	3	2	10
Total (%)	50	30	20	100

Students will be required to submit two homework assignments. In addition, students (working in groups) are required select a project at the beginning of the course. A final report is required at the end of the course. Finally, each group must deliver a 15 minute format presentation to the entire class at the end of the course.

5. Grading of Student Achievement:

Please refer to Grading of Courses in the Academic Regulations

Part III

Keyword Syllabus:

Table-top manufacturing, MEMS, sensor and actuator, micro robotics, micro electronics, VLSI, semiconductor

Recommended Reading:

Liu, C., Foundations of MEMS, Prentice Hall, 2005
ISBN-10: 0131472860

Microchip Manufacturing
Stanley Wolf
Lattice Press (www.latticepress.com)
ISNB 0-9616721-8-8

Understanding Fabless IC Technology
Jeorge Hurtarte
Evert Wolsheimer
Lisa Tafoya, Fabless Semiconductor Association
Elsevier
Paperback, 296 pages, publication date: AUG-2007
ISBN-13: 978-0-7506-7944-2
ISBN-10: 0-7506-7944-1
Imprint: NEWNES

Online Resources:

Online learning material is provided via University computer network.